Very Large Scale Integration Electronics: Plasma Processing for VLSI v. 8

Very Large Scale Integration Electronics: Plasma Processing for VLSI v. 8

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Product details

  • Hardback | 527 pages
  • 147.32 x 241.3 x 33.02mm | 839.14g
  • Academic Press Inc
  • San Diego, United States
  • English
  • 0122341082
  • 9780122341083