A User's Guide to Ellipsometry

A User's Guide to Ellipsometry

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Specifically designed for the user who wants expanded use of ellipsometry beyond the relatively limited number of turn-key applications, this text provides comprehensive discussion of the measurement of film thickness and optical constants in films. The book provides a concise discussion of theory and instrumentation before describing how to use optical parameters to determine material properties and optical parameters for inaccessible substrates and unknown films, and how to measure extremely thin films. The book also addresses polysilicon, a material commonly used in the microelectronics industry and the effect of substrate roughness. The text's concepts and applications are reinforced through 14 case studies that aim to illustrate specific applications of ellipsometry from the semiconductor industry as well as studies involving corrosion and oxide growth.
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Product details

  • Hardback | 260 pages
  • 158.5 x 236 x 17.8mm | 617.08g
  • Academic Press Inc
  • San Diego, United States
  • English
  • appendices, index
  • 0126939500
  • 9780126939507

Table of contents

Theoretical aspects; instrumentation; using optical parameters to determine material properties; determining optical parameters for inaccesible substrates and unknown films; extremely thin films; the special case of polysilicon; the effect of roughness; case studies; chapter references.
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