Ultraviolet Laser Technology and Applications
Ultraviolet Laser Technology and Applications is a hands-on reference text that identifies the main areas of UV laser technology, describes how each is applied, offers clearly illustrated examples of UV optical systems applications, and includes technical data on optics, lasers, materials, and systems. This book is unique for its comprehensive, in-depth coverage. Each chapter deals with a different aspect of the subject, beginning with UV light itself, moving through the optics, sources, and systems, and concluding with detailed descriptions of applications in various fields. The test enables practicing engineers and researchers to utilize concepts and innovations to solve actual problems encountered in UV optical technology applications. It also offers a wealth of information for equipment designers and manufacturers. Features: * Serves as a valuable, practical reference to UV laser technology. * Presents detailed technical data and techniques. * Offers highly illustrated optics designs and beam delivery systems. * Includes an extensive bibliography, references, and glossary. * Covers all major UV laser markets and technology systems.
- Hardback | 328 pages
- 156.97 x 236.22 x 21.34mm | 639.56g
- 24 Oct 1995
- Elsevier Science Publishing Co Inc
- Academic Press Inc
- San Diego, United States
- glossary, index
Table of contents
Ultraviolet light; ablation; the excimer laser; materials research; UV optics and coatings; UV laser in microelectronics - part 1; UV lasers in microelectronics, part 2; deep UV microlithography; micromachining; UV lasers in medicine.