Silicides for VLSI Applications

Silicides for VLSI Applications

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Most of the subject matter of this book has previously been available only in the form of research papers and review articles. I have not attempted to refer to all the published papers. The reader may find it advantageous to refer to the references listed.
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Product details

  • Hardback | 200 pages
  • 164.1 x 238.3 x 18.8mm | 535.25g
  • Academic Press Inc
  • San Diego, United States
  • English
  • 0125112203
  • 9780125112208

Table of contents

Preface. Acknowledgements. Introduction. Properties. Thermodynamic Considerations. Formation. Oxidation. Integrated-Circuit Fabrication. Special Applications. References. Author Index. Subject Index.
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