Silicides for VLSI Applications
Most of the subject matter of this book has previously been available only in the form of research papers and review articles. I have not attempted to refer to all the published papers. The reader may find it advantageous to refer to the references listed.
- Hardback | 200 pages
- 164.1 x 238.3 x 18.8mm | 535.25g
- 23 Jun 1983
- Elsevier Science Publishing Co Inc
- Academic Press Inc
- San Diego, United States
Table of contents
Preface. Acknowledgements. Introduction. Properties. Thermodynamic Considerations. Formation. Oxidation. Integrated-Circuit Fabrication. Special Applications. References. Author Index. Subject Index.