Introduction to Semiconductor Manufacturing Technology
For courses in Semiconductor Manufacturing Technology, IC Fabrication Technology, and Devices: Conventional Flow.This up-to-date text on semiconductor manufacturing processes takes into consideration the rapid development of the industry's technology. It thoroughly describes the complicated and new IC chip fabrication processes in detail-with minimum mathematics, physics, and chemistry. Advanced technologies are covered along with older ones to assist students in understanding the development processes from a historic point of view.
- Hardback | 647 pages
- 198 x 234 x 34mm | 1,179.35g
- 04 Dec 2000
- Pearson Education (US)
- United States
Table of contents
1. Introduction. 2. Introduction of IC Fabrication. 3. Semiconductor Basics. 4. Wafer Manufacturing. 5. Thermal Processes. 6. Photolithography. 7. Plasma Basics. 8. Ion Implantation. 9. Etch. 10. CVD and Dielectric Thin Film. 11. Metallization. 12. CMP (Chemical Mechanical Polishing). 13. Process Integration. 14. CMOS Processes. 15. Summary and Future Trends. Index.