RF Power for Industrial Applications
For 2 to 4 semester-hour courses in RF Power in the Electronics/Computer Technology departments; can also be used for industry courses in RF Power.This text, the only one of its kind on the market, focuses on RF (radio frequency) power for use in industrial applications, where semiconductor manufacturing equipment generates a plasma for processing wafers. The emphasis is on equipment and circuits related to RF power in manufacturing equipment tools such as etchers and chemical vapor deposition, among others. This is a useful book that provides a base upon which a student can pursue more equipment-specific knowledge.
- Hardback | 288 pages
- 190.5 x 236.2 x 20.3mm | 680.4g
- 01 Jun 2003
- Pearson Education (US)
- Upper Saddle River, NJ, United States
Back cover copy
This unique text emphasizes radio frequency power for industrial applications such as industrial heating, MRIs, and generating plasmas in semiconductor manufacturing equipment. "RF Power for Industrial Applications" presents topics from the semiconductor manufacturing perspective, making it useful for both the student and the engineer. Users should have completed courses in DC and AC circuits, semiconductor device fundamentals, basic electronic circuits (amplifiers, power supplies, and oscillators), and basic test and measurement techniques. The accompanying lab manual (ISBN 0-13-096576-6) provides hands-on exercises and reinforces the concepts learned in the text.
Table of contents
1. Introduction. 2. Signal Sources. 3. RF Power Amplifier Fundamentals. 4. High Power RF Amplifiers. 5. Impedance Matching. 6. Introduction to Transmission Lines. 7. Smith Charts. 8. Power Measurement and Control. 9. Troubleshooting and Maintaining RF Power Systems. 10. Industrial Applications of RF Power.