Practical MEMS

Practical MEMS : Analysis and Design of Microsystems, MEMS Sensors (accelerometers, Pressure Sensors, Gyroscopes), Sensor Electronics, Actuators, RF MEMS, Optical MEMS, and Microfluidic Systems

  • Hardback
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Product details

  • Hardback
  • Small Gear Publishing
  • United States
  • 9780982299
  • 9789780982294