Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators
An advanced microscanning device capable of one- and two-dimensional scanning can be integrated in a compact barcode scanning system composed of a laser diode and adapted optics. The original design of the microscanner combines efficiently the miniaturized thermal mechanical actuator and the reflecting mirror, providing a one-dimensional scanning or an unique combination of two movements, depending on the geometry. The simplicity of the device makes it a competitive component.
The authors rethink the design of a miniaturized optical device and find a compact solution for a microspectrometer, based on a tunable filter and a single pixel detector. A porous silicon technology combines efficiently the optical filter function with a thermal mechanical actuator on chip. The methodology for design and process calibration are discussed in detail. The device is the core component of an infrared gas spectrometer.
- Hardback | 268 pages
- 156 x 234 x 17.53mm | 1,270g
- 31 Jan 2002
- Dordrecht, Netherlands
- 2002 ed.
- XII, 268 p.
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Table of contents
2. Basics for a thermally actuated micromirror.
3. Microscanner technology.
4. One-dimensional microscanner.
5. Two-dimensional microscanner.
6. Advanced Optical Filters of Porous Silicon.
7. Micromachining using porous Silicon.
8. Tunable Optical Filter and IR Gas Spectroscopy.
9. Conclusions and outlook.
Appendices. A.1: Complement to the curvature calculation due to residual stress. A.2: Complement to the static temperature distribution calculation. A.3: Large deflections.
References. Symbols and Abbreviations.
Glossary of terms. Acknowledgments.