Novel Silicon Based Technologies

Novel Silicon Based Technologies : Conference Proceedings

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Description

Eight contributions address: GaAs on Si, ion beam synthesis in silicon, ion beam processing of chemical vapor deposited silicon layers, technology and devices for silicon based three-dimensional circuits, integrated fabrication of micromechanical structures on silicon, micromachining of silicon for
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Product details

  • Hardback | 292 pages
  • 163.6 x 242.8 x 22.4mm | 607.82g
  • Dordrecht, Netherlands, United States
  • English
  • Illustr.
  • 0792311124
  • 9780792311126

Review quote

'The book would be a valuable addition to any library and to all industries involved with very large-scale integration process technologies.' J. of Minerals Metals and Material Soc. Aug 1992
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