Microelectromechanical Systems (MEMS): International Mechanical Engineering Congress and Exposition, Dallas, Texas, November 16-21, 1997

Microelectromechanical Systems (MEMS): International Mechanical Engineering Congress and Exposition, Dallas, Texas, November 16-21, 1997

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The proceedings of the November 1997 symposium contain 38 papers on micromechanical systems and microscale energy transport. Part one covers devices and applications; fluidic systems; fabrication and actuators; and characterization and modeling. Part two covers laser absorption by metals and organic
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