Microelectromechanical Systems (MEMS): International Mechanical Engineering Congress and Exposition, Atlanta, Georgia, November 17-22, 1996

Microelectromechanical Systems (MEMS): International Mechanical Engineering Congress and Exposition, Atlanta, Georgia, November 17-22, 1996

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Description

The proceedings of the International Mechanical Engineering Congress and Exposition held in Atlanta in November, 1996 are divided into the following sections: microscale thermal phenomena in electronic systems, including thermal phenomena in semiconductor devices, thermomechanical sensors and actuat
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