Bubbler Cylinder

Bubbler Cylinder

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Please note that the content of this book primarily consists of articles available from Wikipedia or other free sources online. A Bubbler cylinder is a component of a unit for the metal organic chemical vapor deposition (MOCVD). They are devices that are used for conveying electronic grade metalorganic compounds from a liquid or solid precursor into a usable vapor. The container of the Bubblers is similar to the construction of a gas washing bottle and used for the protected storage of metalorganic compounds to exclude air. The bubbler has a supply pipe and a sampling tube. The inlet tube ends just before the bottom of the tube. In this tube, an inert gas is introduced, which bubbles through the liquid chemical; a solid chemical will sublime. The mixture of the controlled inert gas and the vaporized chemical leaves the cyclinder into a downstream reaction vessel. The temperature is controlled by a thermostat, so that a defined, constant steam pressure can be achieved. The supply of the often expensive and sensitive chemical is controlled by the regulated flow of inert gas and the temperature of the bubbler, resulting in a given vapor pressure of the chemical.
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Product details

  • Paperback | 88 pages
  • 152 x 229 x 5mm | 141g
  • Cred Press
  • United States
  • English
  • 6135811231
  • 9786135811230