Practical MEMS: Analysis and Design of Microsystems, MEMS Sensors (accelerometers, Pressure Sensors, Gyroscopes), Sensor Electronics, Actuators, RF MEMS, Optical MEMS, and Microfluidic Systems (Hardback)
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- Published: 30 April 2009
- Format: Hardback
- ISBN 13: 9789780982294 ISBN 10: 9780982299
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