Practical MEMS

Practical MEMS : Analysis and Design of Microsystems, MEMS Sensors (accelerometers, Pressure Sensors, Gyroscopes), Sensor Electronics, Actuators, RF MEMS, Optical MEMS, and Microfluidic Systems

  • Hardback
By (author) Ville Kaajakari

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  • Hardback
  • 30 Apr 2009
  • Small Gear Publishing
  • 9780982299
  • 9789780982294

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